| 摘要 |
<p>An optical beam homogenizer has been improved to emphasize a dual axis, high aspect ratio spot sizing capability. The optical system alters the aspect ratio of the beam by moving three of the four lenticular arrays (12, 14, 16, 18) within the homogenizer. The integrity of dimensional control is maintained by use of a microprocessor (97). The homogenizer can be readily adapted by the addition of a photodetector (95) and the use of the microprocessor to provide continuous beam monitoring for both beam uniformity and tip or tilt of the substrate or stage assembly. The system also has the capability of taking the input beam into the homogenizer, breaking up the beam and recombining it to eliminate most of the optical diffraction present in current homogenizer designs.</p> |
