| 摘要 |
<p>A micromachine is lubricated in a fluid-based process. The known fluid-based process of releasing a sacrificial layer (20) from a micromachine is followed by a fluid-based hydrophilic processing (22) of the micromachine surfaces. A lubricating monolayer surface is then formed (24) on the resultant hydrophilic micromachine surfaces. Afterwards, the surfaces are dried through conventional means (26).</p> |
