Verfahren zur Herstellung mehrfacher leitender Durchführungen

摘要

A method of manufacturing a multiple lead-in sturcture in which spaced deposits of a solvent for the constituents of the lead-in members are provided on a substrate which is then heated to liquify those deposits and form molten droplets. Thereafter, the substrate is exposed to a vapor atmosphere containing the lead-in member constituents which are dissolved in the molten droplets and epitaxially deposit from the droplets onto the surface of the substrate. The latter step is continued until elongated crystals of the lead-in member constituents grow on the sites of the solvent deposits. Thereafter, an insulating material is provided between the elongated crystals. The substrate is then removed and the ends of the crystals provided with metal layers which serve as electrical contacts.