| 摘要 |
<p>1,143,325. Crystal - pulling. INTERNATIONAL BUSINESS MACHINES CORP. 19 May, 1967 [1 July, 1966], No. 23287/67. Heading B1S. In the pulling of a silicon crystal 20 from a melt 10 in a crucible 12 heated by a resistance coil 14, the height of the solid/liquid interface with respect to the resistance heater is maintained constant as pulling proceeds by raising crucible 12 by means of a buoyancy device comprising a float 32 connected to crucible 12 by a shaft 16. Float 32 floats in a liquid 34 in a tank 36 and is also supported by a flat coil constant force springs 40. Tank 36 is surrounded by a cooling water jacket 60. Crucible 12, shaft 16 and the buoyancy device are rotated by means 50. The upper limit of travel of shaft 16 is sensed by a device 65. The cross-sectional area of tank 36 may be varied by the addition or removal of rods 70.</p> |
