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发明名称
MANUFACTURE FOR SEMICONDUCTOR
摘要
申请公布号
JPS5436192(A)
申请公布日期
1979.03.16
申请号
JP19770102901
申请日期
1977.08.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKAGAWA TSUTOMU
分类号
H01L29/74;H01L21/205;H01L29/747
主分类号
H01L29/74
代理机构
代理人
主权项
地址
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