| 摘要 |
PURPOSE:To obtain a ceramic substrate having a thermal expansion coefficient near to that of silicon and a small dielectric constant and improved in antibending strength, moisture resistance, water resistance, etc., by sintering the mixture of specific glass powder with crystal particles. CONSTITUTION:Glass powder comprising 10-30wt.% of MgO, 5-20wt.% of Al2O3, 40-55wt.% of SiO2, 10-20wt.% of B2O3, and 0-5wt.% of R2O (R is alkali metal), 2MgO.2Al2O3.5SiO2 crystal particles or 2MgO.2Al2O3.5SiO2 crystal particles and Al2O3 crystal particles are mixed with each other and subsequently sintered at 850-1000 deg.C to produce an MgO-Al2O3-SiO2 glass ceramic substrate in which the 2MgO.2Al2O3.5SiO2 crystals are deposited from the aggregate surfaces of the 2MgO.2Al2O3.5SiO2 or from the aggregate surfaces of the 2MgO.2Al2O3.5 SiO2 and the Al2O3. |
