发明名称
摘要 A method of making bonding bumps on the pads of an electrical chip including depositing a layer of metallic adhesion material over the surface, depositing metallic bumps on the metallic adhesion material over each of the pad areas using a focused liquid metal ion source, and chemically etching the layer of metallic adhesion material off the surface outside of the deposited bumps.
申请公布号 JPH07501419(A) 申请公布日期 1995.02.09
申请号 JP19920507296 申请日期 1992.02.10
申请人 发明人
分类号 H01L21/60;H01L23/485;H05K3/00;(IPC1-7):H01L21/321 主分类号 H01L21/60
代理机构 代理人
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