| 摘要 |
<p>An apparatus, for photo-luminescent analysis of the surface of crystalline silicon, in which the photons (28) emitted from the sample (14) are passed through a two-beam (or two-arm) interferometer, having the usual beamsplitter (40), fixed mirror (42), and movable mirror (44). The interferometer output (46) is directed to a detector which is a germanium photodiode (50), cooled in a Dewar, which also cools the initial electronic circuitry to which the detector output is input. Using the disclosed apparatus, methods are available for readily eliminating the negative effect of the electron-hole-droplet phenomenon, and for utilizing the no-phonon region of the spectrum to identify otherwise unidentified impurity (or dopant) materials.</p> |
