| 摘要 |
The invention provides a power source device for an ion source, including first to third power source units coupled to the anode, the cathode and the beam extraction electrode of the ion source. The second power source unit applies an alternating voltage across the cathode. An alternating heating current then flows through the cathode. Each cycle of the alternating voltage from the second power source unit has positive and negative components with preset levels which are generated with a predetermined time interval between them. The power source device further includes a control circuit for interrupting the operation of the first and third power source units during the predetermined time interval. |
