| 摘要 |
PURPOSE:To provide a sensor which uses a piezoelectric element so as to make its structure simpler. CONSTITUTION:The periphery of a flexible disk 50 is firmly adhered to the enclosure of a sensor and a force which acts on the central part of the disk 50 is detected. A doughnut-like piezoelectric element 20 is positioned on the upper surface of the disk 50 and an upper electrode layer carrying the patterns of detectors D1-D6 is formed on the upper surface of the element 20. In addition, a lower electrode layer carrying the patterns of the detectors D1-D6 is formed on the lower surface of the element 20 and the lower surface of the lower electrode layer is firmly stuck to the upper surface of the disk 50. Therefore, the six sets of detectors D1-D6 are formed, with each set being formed of parts of the upper and lower electrode layers and element 20 put between the electrode layers. The X-, Y-, and Z-axis components of a force which acts on the central part of the disk 50 can be separately detected from electric charges generated by the detectors D1 and D2, D3 and D4, and D5 and D6. |
