发明名称 LUMINATOR
摘要 PURPOSE:To enhance the uniformity of a light density distribution and to improve an illuminance distribution and the efficiency of condensing light by generating a large number of luminous fluxes by means of outgoing fluxes obtained by mixing fluxes from a light condensing means, overlapping these fluxes and projecting a surface to be irradiated with said fluxes. CONSTITUTION:Luminous fluxes from a light source 1 are condensed by an elliptical mirror 2, made incident on an optical pipe 3 arranged so that an incident surface 3a can be positioned close to a 2nd focus of the mirror 2, and are mixed in the optical pipe 3. The light condenser lens 5 condenses fluxes and converges them on the incident surface 6a of an optical integrator 6. Thus the outgoing surface 3b and the incident surface 6a are optically brought into close contact with each other to improve the efficiency of condensing light. Besides, similar uniform distributions of intensity can be formed on the incident and outgoing surfaces 6a and 3b.
申请公布号 JPS64913(A) 申请公布日期 1989.01.05
申请号 JP19870156873 申请日期 1987.06.24
申请人 CANON INC 发明人 OTA MASAKATSU;SUZUKI AKIYOSHI
分类号 G02B27/00;G02B19/00;G03F7/20;H01L21/027 主分类号 G02B27/00
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