VACUUM VESSEL

摘要

PURPOSE:To transport an article in a vacuum by connecting a vacuum pump for maintaining a vacuum to the main vessel body, and providing a fixing part for fixing and releasing the article in the main vessel body. CONSTITUTION:An opening 7 for the insertion of an article S is provided to the airtight main vessel body 2, and the opening 7 is opened and closed by a gate valve 11. The inside of the main vessel body 2 is evacuated by the vacuum pump 6 connected to the main vessel body 2. The article S is fixed to and released from the fixing part 23 arranged in the main vessel body 2. The sample such as a semiconductor chip which must be transported without being exposed to the atmosphere can be transported by this vacuum vessel in a vacuum.