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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH05287515(A)
申请公布日期
1993.11.02
申请号
JP19920083627
申请日期
1992.04.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
SUZUKI MASARU
分类号
C23C14/32;(IPC1-7):C23C14/32
主分类号
C23C14/32
代理机构
代理人
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地址
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