发明名称 Gas plasma apparatus with movable film liners
摘要 An apparatus for the treatment of articles with a polymerizate-producing gas plasma is disclosed wherein a set of movable film liners is used to shield the walls of a gas-plasma-containing reaction tunnel from excessive build-up of polymerizate deposits. In an operation involving continuous gas plasma coating of a film, fiber, fabric, tubing or string of workpieces, at least 75 to 90 percent of potential wall deposits are removable by the set of film liners.
申请公布号 US5472509(A) 申请公布日期 1995.12.05
申请号 US19930159870 申请日期 1993.11.30
申请人 NEOMECS INCORPORATED 发明人 HIROSHI, NOMURA
分类号 C23C16/44;(IPC1-7):C23C16/00 主分类号 C23C16/44
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