| 摘要 |
PURPOSE:To provide an accelerometer which responds up to a highfrequency region from a DC component and whose measuring accuracy is enhanced. CONSTITUTION:Piezoelements 3, 4, which do not respond to a DC component and whose response up to a high-frequency region is good, are attached to a side plate 2 of a case 1 which is supported by an object 13 to be measured. An additional mass 5 is attached to the piezoelement 3. An additional mass 7 is attached to the piezoelement 4 via a beam 6, and a strain gage 10 is attached to the beam 6. Regarding the region of the DC component, outputs of the piezoelements 3, 4 are equal to each other and cancelled, and acceleration can be measured by the strain gage 10. Regarding the high-frequency region, outputs of the piezoelement 4 and the strain gage 10 are equal to each other and cancelled, and an acceleration can be measured by the piezoelement 3. Regarding a region between the DC component and the high-frequency region, outputs of the piezoelements 3, 4 and the strain gage 10 are equal to each other, and an acceleration can be measured by them. |
