发明名称 Si base substrate covered by a CdTe or Cd-rich CdZnTe layer
摘要 The present invention provides an Si base semiconductor monocrystal substrate which includes an Si(11n) substrate where n=1.5-2.5. An intermediate layer is formed on the Si(11n) substrate. The intermediate layer is made of a material selected from the group consisting of ZnTe and Zn-rich CdZnTe, The intermediate layer has a thickness in the range of 50-200 angstroms. The intermediate layer is oriented in a (11n')B plane. An upper layer is formed on the intermediate layer. The upper layer is made of a material selected from the group consisting of CdTe and Cd-rich CdZnTe. The upper layer is oriented in a (11n'')B plane. The indexes n' and n'' satisfy the following equations. <IMAGE> where y is the lattice mismatch between the Si substrate and the intermediate layer. <IMAGE> where y' is the lattice mismatch between the Si substrate and the upper layer.
申请公布号 US5581117(A) 申请公布日期 1996.12.03
申请号 US19950571414 申请日期 1995.12.13
申请人 NEC CORPORATION 发明人 KAWANO, MASAYA
分类号 H01L21/205;C30B23/02;H01L21/20;H01L21/203;H01L21/36;H01L21/363;H01L31/0264;H01L31/18;(IPC1-7):H01L31/09;H01L29/161;H01L27/14;H01L31/00 主分类号 H01L21/205
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