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发明名称
摘要
申请公布号	JP2571261(Y2)	申请公布日期	1998.05.18
申请号	JP19910039821U	申请日期	1991.05.30
申请人		发明人
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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