发明名称 GATED PHOTOCATHODE FOR CONTROLLED SINGLE AND MULTIPLE ELECTRON BEAM EMISSION
摘要 A photocathode having a gate electrode so that modulation of the resulting electron beam is accomplished independently of the laser beam. The photocathode includes a transparent substrate, a photoemitter, and an electrically separate gate electrode surrounding an emission region of the photoemitter. The electron beam emission from the emission region is modulated by voltages supplied to the gate electrode. In addition, the gate electrode may have multiple segments that are capable of shaping the electron beam in response to voltages supplied individually to each of the multiple segments.
申请公布号 WO9950874(A2) 申请公布日期 1999.10.07
申请号 WO1999US05584 申请日期 1999.03.16
申请人 ETEC SYSTEMS, INC. 发明人 LEE, KIM, Y.;CHANG, TAI-HON, PHILIP;MANKOS, MARIAN;BERGLUND, C., NEIL
分类号 H01J9/12;G03F7/20;H01J1/34;H01J37/063;H01J37/073 主分类号 H01J9/12
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