摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator and a piezoelectric pump increased in service life while securing pump performance and reliability. <P>SOLUTION: This piezoelectric vibrator comprises a shim made of a conductive sheet metal, a piezoelectric body placed on and joined to the shim with a shim side electrode interposed therebetween and an exposure side electrode joined to and placed on the surface of the piezoelectric body on the opposite side of the shim. When positive and negative potentials are alternately applied to the shim side electrode and the exposure side electrode, the piezoelectric vibrator is vibrated. The shim side electrode is made of a conductive material with an adhesion strength higher than that of the exposure side electrode. <P>COPYRIGHT: (C)2007,JPO&INPIT |