Depositor for depositing a dielectric layer with fewer metallic impurities and a method for reducing the content of the metallic impurities in the dielectric layer by using this depositor

摘要

The present invention is characterized by setting a filter in the O3-pipe of the depositor used to depositing a dielectric layer, wherein the filter is used to adsorb the metallic impurities in the O3/O2 pipe. Therefore, the content of metallic impurities in the deposited dielectric layer can be efficiently reduced.