发明名称 METHOD AND APPARATUS FOR WIRE BONDING
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for wire bonding for improving a strength of a fine metal wire connected by forming an arc between a first bonding point and a second bonding point. SOLUTION: The method for wire bonding comprises the steps of forming a hole 11 for exposing the fine metal wire 5 on a side face of a press-bonding tool 1 for passing the wire 5; providing a heating means 3 facing opposite to the hole 11; and forming an arc (loop) L of the wire 5 between the first bonding point A and the second bonding point B, while heating the wire 5 at a temperature which is lower than the melting point of a material of the wire 5 at a temperature or higher of recrystallizing the material for constituting the wire 5 via the hole 11 by the means 3.
申请公布号 JP2002164378(A) 申请公布日期 2002.06.07
申请号 JP20000359892 申请日期 2000.11.27
申请人 SONY CORP 发明人 KISHIDA EIICHIRO
分类号 H01L21/60 主分类号 H01L21/60
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