发明名称 |
SYSTEM AND METHOD FOR AMPLIFYING AN ANGLE OF DIVERGENCE OF A SCANNED ION BEAM |
摘要 |
A system for amplifying a scan of an ion beam is provided. Examples of the system include a magnetic scanner and a beam amplifier in combination. The magnetic scanner is configured to scan the ion beam in a single plane. The beam amplifier is configured to receive the ion beam from the magnetic scanner, amplify a divergence of the ion beam, and focus the ion beam in the single plane. |
申请公布号 |
WO02063654(A2) |
申请公布日期 |
2002.08.15 |
申请号 |
WO2002US03449 |
申请日期 |
2002.02.06 |
申请人 |
PROTEROS, LLC |
发明人 |
ENGE, HARALD;BERRIAN, DONALD, W. |
分类号 |
H01J37/147;H01J37/30;H01J37/317 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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