SHIELDING FOR ARC SUPPRESSION IN ROTATING MAGNETRON SPUTTERING SYSTEMS

摘要

A cathode body (12) for a rotating cylindrical magnetron (10) wherein the magnetron provides a sputtering zone extending along the length of the cathode body (12) and circumferentially along a relatively narrow region thereof. The cathode body (12) includes an elongated tubular member (14) having a target material (16) at t he outer surface thereof. A collar (32) of electrically- conductive material is located at at least one end of the tubular member (14 ), and extends along the tubular member (14) from that one end into the erosion zone. A sleeve of electrically-conductive material may extend circumferentially around the collar (32).