发明名称 Thin film transistor substrate and fabricating method thereof
摘要 A thin film transistor substrate and a fabricating method thereof wherein a contacting size between an electrode and an active layer can be reduced to provide a small and light panel. In the thin film transistor substrate, a conductive layer is formed on the substrate. A first insulating layer for insulating the conductive layer overlies the conductive layer. A second insulating layer this is different from the first insulating layer overlies the first insulating layer. A third insulating layer overlies the second insulating layer. A contact through the first, second, and third insulating layers exposes a portion of the conductive layer and has a trapezoidal section. An electrode is connected to the conductive layer and overlies a portion of an inclined face of the contact hole. The inclined face of the contact hole includes a protrusion formed by a portion of the second insulating layer and creates an overhang structure.
申请公布号 US7262454(B2) 申请公布日期 2007.08.28
申请号 US20050152960 申请日期 2005.06.15
申请人 LG.PHILIPS LCD CO., LTD. 发明人 KIM YOU JIN
分类号 H01L27/108 主分类号 H01L27/108
代理机构 代理人
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