COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method for coating accurately predetermined coating regions of a substrate with a liquid by supplying the liquid from a nozzle to the substrate while moving the nozzle relatively to the substrate. SOLUTION: An organic EL material is ejected toward non-coating regions 12 of a substrate 1 while keeping the non-coating regions 12 of the substrate 1 at test coating positions and moving back and forth a nozzle along the X direction, so as to form coating lines CL on the non-coating regions 12 of the substrate 1. Optical images Icl of the coating lines CL are captured by a CCD camera and then the image data showing the coating lines CL are stored temporarily in the memory of a control part. Furthermore, optical images I11 of grooves 11 of the substrate 1 are captured by a CCD camera while keeping coating regions 11 of the substrate 1 at coating positions and then the image data showing the grooves 11 are stored temporarily in the memory of the control part. The substrate 1 is positioned so that the coating lines CL match the grooves 11 from these image data. Subsequently coating is performed. COPYRIGHT: (C)2008,JPO&INPIT