| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of shortening a time required for determining the optimum inspection condition. SOLUTION: This device is equipped with an illumination means 12 for illuminating an inspection object 10A; processing means 13, 14 for generating inspection information of the inspection object based on diffracted light from the inspection object; monitoring means 13-15 for monitoring an intensity change of the diffracted light to an index with a fixed resolution determined beforehand by using as the index, one of a plurality of parameters for determining an inspection condition of the inspection object before generation of the inspection information; and a control means 15 for controlling the monitoring means in the middle of monitoring of the intensity change of the diffracted light to the index, and changing the resolution so as to have a different magnitude. COPYRIGHT: (C)2008,JPO&INPIT
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