发明名称 MOPA excimer or molecular fluorine laser system with improved synchronization
摘要 The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied to any channel in order to adjust the relative timing delay. This control voltage can be, for example, a magnetization pre-pulse voltage applied to an indictor for a channel in order to adjust a hold-off time. A synchronization control unit and feedback loop can be used to monitor the timing, such that the syncronization control unit can apply a control voltage when a delay change exceeds a timing adjustment threshold value, and can apply a pre-ionization voltage when the delay change is less than the adjustment threshold value. Using both a control voltage and a pre-ionization voltage provides for both coarse and fine adjustment of the delay.
申请公布号 US7366213(B2) 申请公布日期 2008.04.29
申请号 US20040847071 申请日期 2004.05.17
申请人 LAMBDA PHYSIK AG 发明人 GOVORKOV SERGEI V.;KNYSH ANDRIY N.;WIESSNER ALEXANDER O.
分类号 H01S3/00;H01S3/0977;H01S3/22;H01S3/223;H01S3/225;H01S3/23 主分类号 H01S3/00
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