System and method for fault indication on a substrate in maskless applications

摘要

A method and system for fault indication on a substrate. A method of the present invention includes the following steps. It is determined whether data includes at least one suspicious bit. A pattern generator is controlled with the data. A beam of radiation is patterned using the pattern generator. Features are projected by the patterned beam of radiation onto a target portion of a substrate. One or more markers are projected by the patterned beam of radiation onto the substrate indicating the target portions that correspond with the at least one suspicious bit.