Ozone-generating system and ozone generation method

摘要

A system including: an ozone generating device including discharge electrodes forming a discharge space; a gas supplying device; a power source device that supplies power to the discharge electrodes; a temperature adjustment device that adjusts temperature of the discharge electrodes; a control unit that controls the ozone generating device; and a detection unit that detects an ozone generation parameter in the ozone generating device. The control unit increases temperature of the discharge electrodes up to a vaporizing temperature of dinitrogen pentoxide by controlling the temperature adjustment device and the gas supplying device or the temperature adjustment device and the power source device, based on the output ozone generation parameter, to thereby switch operation from a normal operation mode to a cleaning operation mode in which surfaces of the discharge electrodes and the discharge space are cleaned up while continuing generation of ozone in the discharge space.

主权项

1. An ozone generating system, comprising:
an ozone generating device including discharge electrodes that are arranged opposite to each other to thereby form a discharge space; a gas supplying device that supplies an oxygen-containing gas as a source gas for generating ozone to the discharge space; a power source device that supplies power for discharging to the discharge electrodes; a temperature adjustment device that adjusts a temperature of the discharge electrodes; a controller that controls the gas supplying device, the power source device and the temperature adjustment device, to thereby control an operation of the ozone generating device; and a detector that detects an ozone generation parameter in the ozone generating device; wherein, the controller is configured to increase the temperature of the discharge electrodes up to a vaporizing temperature of dinitrogen pentoxide by controlling the temperature adjustment device and the gas supplying device or the temperature adjustment device and the power source device in a cooperative manner, based on an ozone generation parameter output from the detector, and switch the operation of the ozone generating device from a normal operation mode to a cleaning operation mode in which surfaces of the discharge electrodes and the discharge space are cleaned up in a state where the ozone generating device continues to generate ozone in the discharge space.