MODULAR VAPORIZER

摘要

An improved vaporizer for vaporizing a process fluid is provided. The vaporizer may be assembled from stacked plates and may include one or more plenums with a relatively large wall-area-to-cross-sectional-flow-area ratio. The vaporizer may be equipped with one or more heating elements configured to heat the plenums above the vaporization temperature of the precursor. At least some of the plenums may be heated above the vaporization temperature, but below the Leidenfrost temperature, of the precursor. Multiple stacked plate arrangements may be ganged together in series to achieve complete vaporization, if necessary. The vaporizers may be easily disassembleable for cleaning and maintenance.

主权项

1. A vaporizer comprising:
a first process fluid cap plate with a first inlet configured to flow a first process fluid; a first process fluid first peripheral passage plate with a plurality of first process fluid peripheral passage holes; and a first process fluid first plenum volume, wherein:
the first process fluid first plenum volume is bounded, at least in part, by a first surface of the first process fluid cap plate and a first surface of the first process fluid first peripheral passage plate offset from the first surface of the first process fluid cap plate by a first offset distance,the first process fluid first plenum volume fluidically connects the first inlet and the first process fluid peripheral passage holes, andthe distance from the first inlet to at least one of the peripheral passage holes is at least three times greater than the first offset distance.