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发明名称
Vorrichtung zum Ausrichten einer Halbleiterscheibe in bezug auf eine Maskenscheibe
摘要
申请公布号
DE1614041(A1)
申请公布日期
1970.10.22
申请号
DE19671614041
申请日期
1967.03.09
申请人
ERNST LEITZ GMBH
发明人
BRUECK,GUENTER;RINKER,WILHELM
分类号
G03F9/00;H01L21/68
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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