| 摘要 |
1,232,115. Integrated circuits. TELEFUNKEN PATENTVERWERTUNGS G.m.b.H. 27 May, 1968 [31 May, 1967], No 25160/68. Heading H1K. [Also in Division H3 A mechanical resonator associated with means for oscillating it is firmly attached at one end to a semi-conductor integrated circuit block which is connected to another such block by the or another resonator. In one example the connecting resonator serves also as an electrical connection. Each resonator may have one or more piezo-electric or electrostrictive transducer elements associated with it. Thus, as shown in Fig. 4, a number of beam resonators 7 extend between two circuit blocks and are interconnected mechanically by a strip 8. An electrical signal is fed in via piezo-electric transducer 5 and an output signal derived from a similar transducer 6 mounted on the other end beam to form an electromechanical filter. A resonator may be set into torsional vibration by out of phase signals applied via transducers disposed on opposite sides of the centre line of a beam. The beams are preferably formed by electroplating or vapour depositing gold interconnections between groups of circuit elements formed in and on a semi-conductor substrate and then removing semi-conductor material by photo-resist and etching steps to leave isolated blocks with unsupported mechanically resonant interconnections extending between and from them. |
