发明名称 METHOD FOR MAKING OPTICAL MASKS
摘要 1,232,883. Electroless plating. INTERNATIONAL BUSINESS MACHINES CORP. July 29, 1968 [Aug. 16, 1967], No.36006/68. Heading C7F. [Also in Division G2] A process for producing metal images comprises coating a support with a layer of a photosensitive material and a catalyst for the electroless deposition of a metal, imagewise exposing the layer and developing to remove either the exposed or unexposed areas of the layer and then subjecting the developed layer to an electroless plating solution to deposit metal on the remaining areas of the photo-sensitive layer. Specified catalysts are palladium, gold or silver or their salts and the metal to be deposited may be gold, silver, copper, tin or nickel. In the example, a transparent support is coated with polyvinyl alcohol, potassium bichromate and palladium chloride as catalyst, imagewise exposed and developed and treated with a nickel plating bath which electrolessly deposits a nickel image on a photo-resist. The image produced may be used as an optical mask, in printed circuits or in printing plates.
申请公布号 US3615471(A) 申请公布日期 1971.10.26
申请号 USD3615471 申请日期 1968.08.12
申请人 INTERNATIONAL BUSINESS MACHINES CORP. 发明人 JEAN PAUL LENOBLE;BERTRAND JACQUES ALBERT;FRANCOIS G. BOCHARD;JACQUES A. COQUARD;ROGER A. NORTURE
分类号 C23C18/16;G03C1/62;G03F1/12;G03F1/54;G03F7/00;G03F7/04;H01L21/00;H05K3/00;H05K3/18;(IPC1-7):G03C5/00;G03C11/00 主分类号 C23C18/16
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