发明名称 Epitaxially deposited semiconductor material - by flotation - of slice on higher density melt
摘要 <p>A substrate of esp., silicon is brought into contact with and floated on the surface of a melt of higher specific gravity e.g., Si-Sn or Si- or Sn-Pb from which an epitaxial layer is grown on surface cooling, the melt having been first brought to saturated condition by immersion of a seed crystal. The substrate is prepared by surface etching and held in a Vee shaped lower ended cylindrical jig esp., of quartz. A simple, reproducible method of producing uniform defect free epitaxial growth.</p>
申请公布号 DE2029209(A1) 申请公布日期 1971.12.16
申请号 DE19702029209 申请日期 1970.06.13
申请人 LICENTIA GMBH 发明人
分类号 C30B19/06;H01L21/00;(IPC1-7):01J17/06 主分类号 C30B19/06
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