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发明名称
Verfahren und Vorrichtung zur Herstellung von harten UEberzuegen aus Titan- und/oder Tantalverbindungen
摘要
申请公布号
DE1954366(C2)
申请公布日期
1972.02.03
申请号
DE19691954366
申请日期
1969.10.29
申请人
HERAEUS GMBH W C
发明人
REICHELT WALTER DR
分类号
C23C14/00;C23C16/505;H01J37/32;(IPC1-7):C23C11/08
主分类号
C23C14/00
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