| 摘要 |
<p>PURPOSE:To obtain a stable ZnO element, which has a high reliability, is not deteriorated its characteristics and has a high discharge voltage, by a method wherein a composite oxide obtained from additives excluding specified additives, the excluded additives and ZnO are mixed and are granulated to form a molded material. CONSTITUTION:In a process, in which ZnO is used as a main component and additives, such as BiO2O3, Co2O3, MnO, Sb2O3, Cr2O3, NiO, SiO2, GeO2, Al(NO3)3 and B2O3, are mixed with the ZnO, the additives excluding the SiO2 and/or the GeO2 are first mixed and the mixture is calcined at 800 to 1000 deg.C in the atmosphere and is ground to obtain a composite oxide. After that, the composite oxide, single oxides of the SiO2 and/or the GeO2 and the ZnO are mixed and are granulated to form a molded material. Then, a first heat treatment that the molded material is sintered at about 1050 to 1300 deg.C, is cooled down to less than about 300 deg.C, is heated up to about 800 to 950 deg.C, is held for one to three hours at the above temperature and is cooled down to less than about 300 deg.C and a second heat treatment that the molded material is again heated up to about 650 to 900 deg.C, is held for one to three hours at the above temperature and is cooled down to room temperatures are conducted.</p> |
