| 摘要 |
PURPOSE:To reduce the impact load given to the surface of bonding by lowering the gain characteristics of a driving circuit before a bonding tool reaches the bonding surface. CONSTITUTION:A working pattern signal A is outputted at the time T1 by a control circuit, a capillary tool 2 is lowered at a high speed V1, and when the capillary 2 reaches a search level SL, it is lowered at a low speed V2. When the tip of the capilary 2 reaches the point of the preset value which is stored in a memory in advance, the gain of the control circuit is changed to low gain characteristics. When the ball 3a is brought into contact with the bonding surface S at the time T3, the lowering speed of the capillary tool 2 suddenly becomes slow. When the ball 3a is brought into contact with the bonding surface at the time T4, the output of the working pattern signal A is stopped by the control circuit. The deviation between the working pattern signal A and a feedback signal B becomes large, but as gain is low, a large impact load is not given to the bonding surface. |
