LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE:To improve yield by forming a light shielding film on the 2nd electrode substrate facing the 1st electrode substrate on which transistor matrix arrays and display picture element electrodes are integrated and formed. CONSTITUTION:The display picture element electrodes 16 are formed on the electrode substrate 1 by depositing an Mo film on a transparent glass substrate to form gate electrodes 12 then depositing SiO2 thereon to form a gate insulating film 13 and depositing an ITO film thereon by evaporation. An amorphous Si layer 14 having high resistance is formed by glow discharge decomposition of SiH4 thereon and is patterhed; thereafter an Al film is deposited by evaporation and is patterned to form source electrodes 15 and drain electrodes 152. An SiO2 film 17 is deposited over the entire surface and the contact holes between bonding pads and a counter electrode are opened, by which the substrate 1 is manufactured. The electrode substrate 2 is manufactured by depositing the ITO film by evaporation on a transparent glass substrate 21 and sputtering further Mo to pattern the film so as to correspond to the display picture element electrode parts. The substrate 2 is adhered to the substrate 1 so as to face said electrode and a liquid crystal 3 is injected therebetween. The number of stages for photoetching is thus decreased and the yield is improved.