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发明名称
VAPOR-PHASE REACTOR
摘要
申请公布号
JPH0234789(A)
申请公布日期
1990.02.05
申请号
JP19880182044
申请日期
1988.07.21
申请人
HITACHI ELECTRON ENG CO LTD
发明人
YOSHIDA AKIRA
分类号
C23C14/50;C23C16/44
主分类号
C23C14/50
代理机构
代理人
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