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经营范围
发明名称
DEVELOPING TREATMENT APPARATUS OF WAFER
摘要
申请公布号
KR950005390(Y1)
申请公布日期
1995.07.08
申请号
KR19920010233U
申请日期
1992.06.10
申请人
LG ELECTRON CO., LTD.
发明人
SO, JONG - GIL
分类号
H01L21/027;H01L21/64;(IPC1-7):H01L21/64
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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