X-RAY ANALYZER, FINE PART X-RAY DIFFRACTING DEVICE, FLUORESCENT X-RAY ANALYZER, AND X-RAY PHOTOELECTRON ANALYZER

摘要

PURPOSE:To enable a crystal structure analysis in an extremely small area by provid ing an X-ray converging mirror which is different in object point side focus position and match in image point side position behind an asymmetrical reflecting crystal spectroscope. CONSTITUTION:Incident X rays are shaped by a collimator to irradiate the asymmetri cal reflecting crystal spectroscope 2. Reflected X rays from the spectroscope 2 are projected on the spectroscope. The projection X rays are converged on the surface of a sample 4 by the X-ray mirror 3 which is arranged behind the spectroscope. Conse quently, the influence of an increase in X-ray width on a horizontal plane due to an increase in the angle of the projection X rays and a decrease in brightness can be eliminated. The intensity of diffracted X rays 5 from the sample 4 and a two-dimen sional image are measured with a photograph or by a two-dimensional X-ray detector 6 such as an imaging plate and then a structural analysis such as a crystal azimuth direction measurement is enabled by being associated with the crystal interval and phase identification in the extremely small area of the sample 4 and the driving of a sample table 7. Synchrotron radiant light is used as an X-ray light source to obtain fine X-ray flux with high intensity and optional wavelength.