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发明名称
PHYSICAL VAPOR PROCESSING OF A SURFACE WITH NON-UNIFORMITY COMPENSATION
摘要
申请公布号
KR20010099597(A)
申请公布日期
2001.11.09
申请号
KR1020017000829
申请日期
2001.01.19
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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