发明名称 |
METHOD FOR PRODUCING CARBON NANOTUBE |
摘要 |
PURPOSE: Provided is a method for producing carbon nanotube, by which it is possible to produce carbon nanotubes which have excellent electric filed emission properties and can be selectively grown by electrochemical etching, lift-off, pulsed laser deposition and RF magnetron sputtering techniques. CONSTITUTION: The method for producing carbon nanotube includes steps of (i) forming a metal layer(200) on the back of silicone wafer(100); (ii) forming pores in the silicone wafer; (iii) forming photosensitive layer pattern on the front of the silicone wafer; (iv) forming metallic catalyst layer on the surface of the silicone wafer with the photosensitive layer formed; (v) removing the photosensitive pattern to leave the metallic catalyst layer where the photosensitive pattern has not formed; and (vi) vertically orienting carbon nanotubes on the metallic catalyst layer.
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申请公布号 |
KR20020039412(A) |
申请公布日期 |
2002.05.27 |
申请号 |
KR20000069205 |
申请日期 |
2000.11.21 |
申请人 |
KWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, SEONG HUN;SON, JEONG IN |
分类号 |
C01B31/02;(IPC1-7):C01B31/02 |
主分类号 |
C01B31/02 |
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