| 摘要 |
PROBLEM TO BE SOLVED: To at least partially overcome a conventional defect. SOLUTION: A sensing device 50' comprises a microelectromechanical structure, and a control loop 53' for controlling the microelectromechanical structure. The microelectromechanical structure comprises a stator element and a rotor element coupled together. The control loop 53' comprises a position interface 56 supplying a position signal VOUT indicative of the position of the rotor element and a one-bit quantizer 66 receiving the position signal VOUT and supplying a corresponding bit sequence OUT. The sensing device 50' comprises calibration devices 84 and 86 for calibrating the microelectromechanical structure and including a microactuator coupled to the rotor element and driving circuits 84 and 86 for driving the microactuator, and receiving the bit sequence OUT and supplying a driving signal VCAL correlated to a mean value MBS of the bit sequencer OUT to the microactuator in a given time window. |
