Flexible substrate support structure including a temporary rigid substrate with trenches

摘要

A flexible liquid crystal display (LCD) substrate support structure and a method of supporting a flexible LCD substrate during fabrication have been provided. The method forms channels or trenches in-between a rigid support substrate and the flexible LCD substrate. A vacuum is created in the channels or trenches to pull adhesive in. The adhesive formed in this manner contains no air or water bubbles whose expansion in subsequent LCD fabrication processes can destroy the integrity of thin film transistor films formed on the flexible LCD substrate.