| 摘要 |
PROBLEM TO BE SOLVED: To provide a component hardly generating a crack extending from an identification marker as a start point and in a plasma treatment apparatus, and to provide a method capable of detecting the lifetime of the component utilizing the identification marker. SOLUTION: In the plasma treatment apparatus 1, plasma is produced in a treatment container 10 containing a substrate W to apply plasma treatment to the substrate W. The identification markers 20, 21 are labelled on the surface of the component 17 disposed in the treatment container 10. Each marker has one or two or more of symbols 21 in combination, and each symbol has a substantially circular shape as viewed in a plane and being formed by arranging a plurality of dotted holes 22 each having a substantially U shape in its longitudinal cross sectional shape. COPYRIGHT: (C)2006,JPO&NCIPI
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