| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow controlling device and method, capable of controlling a flow rate with high rangeability while maintaining high controllability. SOLUTION: This flow controlling device has: fluid conduits 1, 2, 4, 5; and flat valve support base plate 3 disposed halfway along the fluid conduits. The valve support base plate 3 is installed with a plurality of individually operable opening/closing valves 11. By opening/closing the opening/closing valve appropriately selected from the plurality of opening/closing valves 11, the flow control having the high rangeability can be performed. COPYRIGHT: (C)2007,JPO&INPIT
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