| 摘要 |
PROBLEM TO BE SOLVED: To provide a sulfuric-acid-based cupric electrolyte solution in which a glossy electrodeposited copper film can be formed which has not been obtained in a conventionally available cupric electrolyte solution. SOLUTION: The sulfuric-acid-based cupric electrolyte solution includes 3-mercapto-1-propane sulfonate, and/or bis(3-sulfopropyl)disulfide, a polymer of a quarternary ammonium salt having a cyclic structure, and chlorine. The copper film formed by electrodeposition in the cupric electrolyte solution has a profile with such a low surface roughness (Rzjis) as less than 1.0μm and a glossiness [Gs (60°)] of 400 or higher on the surface in a deposition side. COPYRIGHT: (C)2007,JPO&INPIT
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