发明名称 VERFAHREN MITTELS ABTASTENDEN MIKROSKOPSPRITZEN UND PRODUKTE DAFÜR ODER DADURCH ERZEUGT
摘要 The invention provides a lithographic method referred to as "dip pen" nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a "pen," a solid-state substrate (e.g., gold) as "paper," and molecules with a chemical affinity for the solid-state substratte as "ink." Capillary transport of molecules from the SPM tip to thee solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the facrication of a variety of microscale and nanoscale devices. The invention also provices substrates patterened by DPN, including submirocmeter combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air. The method comprises coating an AFM tip with a hydrophobic compound, the hydrophobic compoind being selected so that AFM imaging perfromed using the coated AFM tipn is improved compared to AFM imaging preformed using an uncoated AFM tip. Finally, the invention provides AFM tips coated with the hydrophobic compounds.
申请公布号 AT386570(T) 申请公布日期 2008.03.15
申请号 AT20010939491T 申请日期 2001.05.25
申请人 NORTHWESTERN UNIVERSITY 发明人 MIRKIN, CHAD;PINER, RICHARD;HONG, SEUNGHUN
分类号 A61N5/00;B05D1/00;B05D1/18;B05D1/26;B82B3/00;G01Q70/06;G01Q70/16;G01Q80/00;G03F1/00;G03F7/00;G03F7/16;G03F7/20;G21G5/00;H01L21/027 主分类号 A61N5/00
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