摘要 |
<p>TREATING AGENT MATERIALS A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which may be an acid, a base, an onium compound, a dehydrating agent, and combinations thereof, and an optional solvent or mixture of a main solvent and a co-solvent.</p> |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
BHANAP, ANIL, S.;KOROLEV, BORIS, A.;LEUNG, ROGER, Y.;MUNOZ, BETH, C.;RAMOS, TERESA, A.;ROTH, ROBERT, R.;APEN, PAUL, G.;ENDISCH, DENIS, H.;DANIELS, BRIAN, J.;NAMAN, ANANTH;IWAMOTO, NANCY |